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13 October 1995 Optics education for machine operators in the semiconductor industry: moving beyond button pushing
Meg Karakekes, Deborah Currier
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Proceedings Volume 2525, 1995 International Conference on Education in Optics; (1995) https://doi.org/10.1117/12.224035
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States
Abstract
In the competitive semiconductor manufacturing industry, employees who operate equipment are able to make greater contributions if they understand how the equipment works. By understanding the 'why' behind the 'what', the equipment operators can better partner with other technical staff to produce quality integrated circuits efficiently and effectively. This additional knowledge also opens equipment operators to job enrichment and enlargement opportunities. Advanced Micro Devices (AMD) is in the process of upgrading the skills of its equipment operators. This paper is an overview of a pilot program that employs optics education to upgrade stepper operators' skills. The paper starts with stepper tasks that require optics knowledge, examines teaching methods, reports both end-of-course and three months post-training knowledge retention, and summarizes how the training has impacted the production floor.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Meg Karakekes and Deborah Currier "Optics education for machine operators in the semiconductor industry: moving beyond button pushing", Proc. SPIE 2525, 1995 International Conference on Education in Optics, (13 October 1995); https://doi.org/10.1117/12.224035
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KEYWORDS
Lamps
Integrated optics
Semiconducting wafers
Mirrors
Optics education
Geometrical optics
Samarium
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