Pulsed UV laser applications for surface science: nanostructure fabrication to diamond deposition

Hiroyuki Hiraoka; M. Sendova; C.-H. Lee; S. Latsch; T. M. Wong; Je-Kyung Sung; C.-T. Hung; T. Smith

doi:10.1117/12.221480

25 September 1995 Pulsed UV laser applications for surface science: nanostructure fabrication to diamond deposition

Hiroyuki Hiraoka, M. Sendova, C.-H. Lee, S. Latsch, T. M. Wong, Je-Kyung Sung, C.-T. Hung, T. Smith

Proceedings Volume 2547, Laser Techniques for Surface Science II; (1995) https://doi.org/10.1117/12.221480
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Pulsed UV lasers such as the 4th harmonic emission of Nd:YAG laser at 266 nm and ArF excimer laser at 193 nm have been used for surface modification of polymer surfaces, nano- structure fabrications on polymers and silicon substrates, and diamond deposition using photoablated polymer plumes. We report research carried out in our laboratory on these three topics.

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Hiroyuki Hiraoka, M. Sendova, C.-H. Lee, S. Latsch, T. M. Wong, Je-Kyung Sung, C.-T. Hung, and T. Smith "Pulsed UV laser applications for surface science: nanostructure fabrication to diamond deposition", Proc. SPIE 2547, Laser Techniques for Surface Science II, (25 September 1995); https://doi.org/10.1117/12.221480

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