Interferometry for measuring large aspherical surfaces with holographic optical elements made by two steps

Takashi Mizobuchi; Hiroaki Ueda; Toshihiro Kubota; Eiji Shimizu

doi:10.1117/12.215608

2 August 1995 Interferometry for measuring large aspherical surfaces with holographic optical elements made by two steps

Takashi Mizobuchi, Hiroaki Ueda, Toshihiro Kubota, Eiji Shimizu

Author Affiliations +

Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215608
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan

Abstract

Interferometry with a holographic optical element for measuring the shape of large aspherical surfaces is reported. The interference fringe pattern between a parallel reference beam and a reconstructed wavefront from a master zone plate which has a very precise pattern drawn by an electron beam drawing machine is recorded on a hologram plate with an off-axis optical arrangement. The hologram plate used as the standard element is reconstructed by the conjugate beam in a modified Twyman-Green interferometer. Insufficient parallelism of commercial hologram plates and the difference in reflection ratio between a sample and the reference mirror can be compensated by this method. Not only rotationally symmetric lenses but also nonrotationally symmetric samples are available. It is also easy to make replicas. Some experimental results are also presented.

Citation Download Citation

Takashi Mizobuchi, Hiroaki Ueda, Toshihiro Kubota, and Eiji Shimizu "Interferometry for measuring large aspherical surfaces with holographic optical elements made by two steps", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); https://doi.org/10.1117/12.215608

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