Micromachined Fabry-Perot cavity pressure transducer with optical fiber interconnects

Youngmin Kim; Dean P. Neikirk

doi:10.1117/12.221174

15 September 1995 Micromachined Fabry-Perot cavity pressure transducer with optical fiber interconnects

Youngmin Kim, Dean P. Neikirk

Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221174
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

A monolithically integrated Fabry-Perot cavity pressure transducer has been fabricated using micromachining techniques that are fully compatible with silicon IC processing technology. Surface micromachining can produce a high quality micro cavity without the wafer bonding process that has been commonly used in previously fabricate Fabry-Perot pressure transducers. Dielectric film stacks consisting of layers of silicon nitride and silicon dioxide were used as mirrors. An air gap cavity was formed by selectively etching a sacrifical polysilicon layer. Remote pressure measurement was demonstrated using the micromachined Fabry-Perot cavity and a multimode optical fiber interconnect. The measured response of the sensor has been compared with theoretical simulation which takes into account the averaging effect caused by the shape of the deflected mirror in the cavity.

Citation Download Citation

Youngmin Kim and Dean P. Neikirk "Micromachined Fabry-Perot cavity pressure transducer with optical fiber interconnects", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); https://doi.org/10.1117/12.221174

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