Modulated pitch phase gratings used in displacement encoder

K. Hane

doi:10.1117/12.2316237

1 September 1996 Modulated pitch phase gratings used in displacement encoder

K. Hane

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 2778F8 (1996) https://doi.org/10.1117/12.2316237
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

The binary phase grating with the modulated pitch is investigated for a simple displacement encoder. The index grating consists of a binary phase grating to eliminate the zero-th order diffraction and the pitch of the grating is modulated to compensate the higher harmonics of the encoder displacement signal. Therefore, an undistorted sinusoidal signal as a function of displacement is obtained by simply superimposing a conventional binary amplitude scale grating on the modulated pitch phase gratings with any air gap between the gratings. The characteristics of the proposed gratings and the encoder signal are investigated by the Fresnel diffraction theory. The proposed grating was fabricated lithographically and the signal was examined experimentally. Considering these results, this method can reduce interpolation error and will be effective for an encoder in precision machining.

Citation Download Citation

K. Hane "Modulated pitch phase gratings used in displacement encoder", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778F8 (1 September 1996); https://doi.org/10.1117/12.2316237

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