Back-illuminated CCDs developed for the reflection grating spectrometer on board XMM

T. M. V. Bootsma; Henry J. M. Aarts; Marcel L. van den Berg; A. C. Brinkman; Antonius J. F. den Boggende; Jan-Willem den Herder; L. de Jong; Piet A. J. de Korte; S. M. Olsthoorn; E. J. van Zwet; Alan Owens

doi:10.1117/12.256020

31 October 1996 Back-illuminated CCDs developed for the reflection grating spectrometer on board XMM

T. M. V. Bootsma, Henry J. M. Aarts, Marcel L. van den Berg, A. C. Brinkman, Antonius J. F. den Boggende, Jan-Willem den Herder, L. de Jong, Piet A. J. de Korte, S. M. Olsthoorn, E. J. van Zwet, Alan Owens

Author Affiliations +

Proceedings Volume 2808, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VII; (1996) https://doi.org/10.1117/12.256020
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

Back-illuminated CCDs with high quantum efficiency in the soft x-ray range have been developed by EEV in collaboration with the Space Research Organization of the Netherlands (SRON) and the European Space Agency (ESA). These CCDs will be used as detector for the reflection grating spectrometer on board of the ESA x-ray multi-mirror mission XMM. To cover the full image of the reflection grating spectrometer an array of 9 CCDs along the Rowland circle with minimum dead space between the adjacent CCDs is needed. To obtain a high quantum efficiency over the full energy range (0.35 to 2.3 keV) the CCDs are illuminated from the backside. This requires a thin (approximately 50 nm) and homogeneous passivated layer at the backside, which is obtained by gas immersion laser doping. In addition a thin Al layer is deposited on the backside to reduce the sensitivity of the CCDs for visible/UV light. The technical aspects of the production of these CCDs as well as their calibration are discussed.

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T. M. V. Bootsma, Henry J. M. Aarts, Marcel L. van den Berg, A. C. Brinkman, Antonius J. F. den Boggende, Jan-Willem den Herder, L. de Jong, Piet A. J. de Korte, S. M. Olsthoorn, E. J. van Zwet, and Alan Owens "Back-illuminated CCDs developed for the reflection grating spectrometer on board XMM", Proc. SPIE 2808, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VII, (31 October 1996); https://doi.org/10.1117/12.256020

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