Noise-immune phase-shifting interferometric system based on Markov nonlinear filtering method

Igor P. Gurov; D. V. Sheynikhovich

doi:10.1117/12.253454

8 October 1996 Noise-immune phase-shifting interferometric system based on Markov nonlinear filtering method

Igor P. Gurov, D. V. Sheynikhovich

Proceedings Volume 2823, Statistical and Stochastic Methods for Image Processing; (1996) https://doi.org/10.1117/12.253454
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

In precise measurement of objects geometric characteristics are widely used the phase-shifting interferometric systems. Simple data processing algorithms are usually realized, but it is difficult to optimize such systems for accuracy increasing on general totality of measured data because of nonlinear data transformation. Besides that an important problem is the noise-immune phase unwrapping on intervals more than 27t rad. Proposed interferometric system is free from these disadvantages. In the system new method and algorithm of phase estimation are realized, which are based on Markov theory of optimal non-linear filtering. The main advantages of proposed system are the following: data processing in real time scale, solving the phase unwrapping problem and minimization of phase errors in conditions of influence of phase fluctuations and noise correlated with the signal. Phase restoration error in typical measurement conditions does not exceed 0. 15 rad. on criterion peakvalley, while rms-error does not exceed 0.05 rad. The system provides the possibility to solve the synthesis and optimization problems of wide class of multidimensional, unstationary and non-linear systems

Citation Download Citation

Igor P. Gurov and D. V. Sheynikhovich "Noise-immune phase-shifting interferometric system based on Markov nonlinear filtering method", Proc. SPIE 2823, Statistical and Stochastic Methods for Image Processing, (8 October 1996); https://doi.org/10.1117/12.253454

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