Paper
22 November 1996 Active bimorph structure for x-ray gratings and mirrors
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Abstract
Since many years CILAS developed active mirrors for synchrotron radiation beamlines. The paper presents the recent developments of bimorph structures usable for x ray mirrors, monochromator crystals, and gratings. The adaptation of the structure to the 3 applications above mentioned is done by choosing the upperplate material and surface coating. The bimorph structure is designed to produce a simple spherical bending of the active plate, or more sophisticated shapes as ellipsoids or parabola. The bimorph structure can be delivered in a mechanical housing able to properly support it. High voltage amplifiers with digital input fitted to control the shape as well as a curvature measurements system may be delivered providing the possibility of closed loop operation. Standard versions of bimorph mirrors and gratings are available. Most of the development works was done under ESRF support.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean-Paul Gaffard and Pascal Jagourel "Active bimorph structure for x-ray gratings and mirrors", Proc. SPIE 2856, Optics for High-Brightness Synchrotron Radiation Beamlines II, (22 November 1996); https://doi.org/10.1117/12.259872
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KEYWORDS
Mirrors

Disk lasers

Electrodes

Wavefronts

Image sensors

Wavefront sensors

Charge-coupled devices

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