New correction method for FTIR online film-thickness measurement

Dongsheng Wang; Yunping Yang; Jizuo Zou

doi:10.1117/12.258292

11 November 1996 New correction method for FTIR online film-thickness measurement

Dongsheng Wang, Yunping Yang, Jizuo Zou

Proceedings Volume 2857, Advanced Materials for Optical and Precision Structures; (1996) https://doi.org/10.1117/12.258292
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

In FTIR film thickness measurement system, traditional process for determining film thickness is optical interference method or absorption method. In practice, both interference effect and absorption effect make a partial contribution to spectrum respectively. When both of the tow effects have influence on measurement, neither interference method nor absorption method can be individually used to determine the film thickness accurately. A new mathematical correction method is described for FTIR film thickness measurement in this case. Employing this new mathematical correction method, the effects of interference and absorption can be apart form each other effectively. The film thickness measurement accuracy of (lambda) /100 has been achieved.

Citation Download Citation

Dongsheng Wang, Yunping Yang, and Jizuo Zou "New correction method for FTIR online film-thickness measurement", Proc. SPIE 2857, Advanced Materials for Optical and Precision Structures, (11 November 1996); https://doi.org/10.1117/12.258292

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