Dynamic angle measurement using an acousto-optic deflector

LiJiang Zeng; Takeshi Ohnuki; Hirokazu Matsumoto; Keiji Kawachi

doi:10.1117/12.256246

1 November 1996 Dynamic angle measurement using an acousto-optic deflector

LiJiang Zeng, Takeshi Ohnuki, Hirokazu Matsumoto, Keiji Kawachi

Proceedings Volume 2863, Current Developments in Optical Design and Engineering VI; (1996) https://doi.org/10.1117/12.256246
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

A scanning beam collimation (SBC) method is developed for measuring dynamic angle variations in which an acousto-optic deflector is used as a diffractive scanner to compensate the angle variation in real time, and a position sensor is used to detect the position of the beam that is reflected from the reflector (i.e., object) to be measured. The angle variation can be measured at high speed due to the very high scanning speed available in the acousto-optic deflector. There was good agreement between the angle variation measured using the SBC method and that using a conventional electronic autocollimator. The repeatability, resolution, and linearity of the scanning beam collimation method were determined using a piezo translator to generate tilt angle; the results showing that high accuracy also can be achieved in dynamic angle variation measurement. The SBC method was applied to measure the tilt angle variation caused by the beating force of a dragonfly attached to one end of a gauge block. The results confirmed the effectiveness of this new method.

Citation Download Citation

LiJiang Zeng, Takeshi Ohnuki, Hirokazu Matsumoto, and Keiji Kawachi "Dynamic angle measurement using an acousto-optic deflector", Proc. SPIE 2863, Current Developments in Optical Design and Engineering VI, (1 November 1996); https://doi.org/10.1117/12.256246

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KEYWORDS

Mirrors

Position sensors

Ferroelectric materials

Acousto-optics

Autocollimators

Reflectors

Collimation

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