Applications of laser vibrometer in vibration measurement of microstructures

Jia Wang; Enyao Zhang

doi:10.1117/12.248654

23 August 1996 Applications of laser vibrometer in vibration measurement of microstructures

Jia Wang, Enyao Zhang

Proceedings Volume 2868, Second International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (1996) https://doi.org/10.1117/12.248654
Event: Second International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 1996, Ancona, Italy

Abstract

The micro- and nano-science and technology has been developing in recent years. Employing the state-of-the-art manufacturing technology the sizes of microstructures are generally in micrometer scale or even in nanometer scale. This paper describes several vibration measurements in microstructure investigations with a laser vibrometer. The microstructures are Si lever, cantilever and cantilever probe in the AFM. Dynamic characteristics of optical fiber building the distance regulation in the NSOM and of Si membrane excited with laser beam in single direction and double opposite direction in thermal sensors were investigated. The vibration curves and experimental results are given. Further possible vibration measurements in micromachine and nano-science and technology is discussed.

Citation Download Citation

Jia Wang and Enyao Zhang "Applications of laser vibrometer in vibration measurement of microstructures", Proc. SPIE 2868, Second International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (23 August 1996); https://doi.org/10.1117/12.248654

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