Fabrication and performance of MARS optical modulators for fiber-to-the-home systems

James A. Walker; Keith W. Goossen

doi:10.1117/12.251217

23 September 1996 Fabrication and performance of MARS optical modulators for fiber-to-the-home systems

James A. Walker, Keith W. Goossen

Proceedings Volume 2879, Micromachining and Microfabrication Process Technology II; (1996) https://doi.org/10.1117/12.251217
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

The methods used to fabricate silicon optical modulators (MARS) devices in several material systems are described. Experimental results showing low bit-error-rate performance at 3.5 Mbit/sec. with a broad optical spectrum are presented.

Citation Download Citation

James A. Walker and Keith W. Goossen "Fabrication and performance of MARS optical modulators for fiber-to-the-home systems", Proc. SPIE 2879, Micromachining and Microfabrication Process Technology II, (23 September 1996); https://doi.org/10.1117/12.251217

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