Methods to control plasma parameters in experiments on pulsed laser deposition of carbon films

Maria A. Stepanova; Vladimir N. Anisimov; Oleg N. Derkach; Valeria G. Grishina; Andrey Yu. Sebrant

doi:10.1117/12.270033

27 March 1997 Methods to control plasma parameters in experiments on pulsed laser deposition of carbon films

Maria A. Stepanova, Vladimir N. Anisimov, Oleg N. Derkach, Valeria G. Grishina, Andrey Yu. Sebrant

Proceedings Volume 2993, Lasers as Tools for Manufacturing II; (1997) https://doi.org/10.1117/12.270033
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Studies of laser pulsed deposition of thin films show that introduction of an obstacle like a grid screen into ablation plume substantially affects dynamics of plasma expansion and results in dramatic changes of plasma parameters. Two regimes of plasma-grid interaction have been studied in detail -- regime of the free-molecular flow and the throttling. The grid screen may break plasma plume into several interacting with each other flows. Some features of plasma-grid interaction (like transformation of velocity distribution function and variation of plasma temperature and density) can be attributed to the interaction of plasma flow with the generated shock wave. Different dimensional effects controlling plasma-grid interaction have been considered. We report the effect of velocity distribution transformation on the stage of interaction between multiple plasma flows behind the screen. Two modes of such transformation have been observed: linear growth of density in the resulting flow, and formation of the additional slow peak in the velocity distribution. We associate these two modes of transformation with two different regimes of plasmas interaction -- with regime of lateral loss reduction, and regime of expansion in the background gas.

Citation Download Citation

Maria A. Stepanova, Vladimir N. Anisimov, Oleg N. Derkach, Valeria G. Grishina, and Andrey Yu. Sebrant "Methods to control plasma parameters in experiments on pulsed laser deposition of carbon films", Proc. SPIE 2993, Lasers as Tools for Manufacturing II, (27 March 1997); https://doi.org/10.1117/12.270033

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KEYWORDS

Plasma

Particles

Ions

Carbon

Pulsed laser deposition

Signal attenuation

Transparency

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