Greater-than-90% QE in visible spectrum perceptible from UV to near-IR Hamamatsu thinned back-illuminated CCDs

Masaharu Muramatsu; Hiroshi Akahori; Katsumi Shibayama; Syunsuke Nakamura; Kouei Yamamoto

doi:10.1117/12.275165

25 April 1997 Greater-than-90% QE in visible spectrum perceptible from UV to near-IR Hamamatsu thinned back-illuminated CCDs

Masaharu Muramatsu, Hiroshi Akahori, Katsumi Shibayama, Syunsuke Nakamura, Kouei Yamamoto

Author Affiliations +

Proceedings Volume 3019, Solid State Sensor Arrays: Development and Applications; (1997) https://doi.org/10.1117/12.275165
Event: Electronic Imaging '97, 1997, San Jose, CA, United States

Abstract

CCDs feature low amplifier noise, high sensitivity and wide dynamic range. Therefore, CCDs have been used in such diverse applications as general purpose imaging, industrial inspection, medical diagnostics and astrophysics. For each application, a suitable image area, optical characteristics, electrical characteristics and even appropriate package must be required. Among these, back illuminated CCDs have enhanced sensitivity for UV light, soft x-rays and electrons. Hamamatsu Photonics KK has developed FFT, MPP mode back illuminated CCDs optimized for spectroscopy. For spectroscopic applications, CCDs should have responsivity from the UV to near-IR as well as having low dark current and wide dynamic range in the binning mode. Stability of the spectral response curve is also important to achieve high precision measurements.

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Masaharu Muramatsu, Hiroshi Akahori, Katsumi Shibayama, Syunsuke Nakamura, and Kouei Yamamoto "Greater-than-90% QE in visible spectrum perceptible from UV to near-IR Hamamatsu thinned back-illuminated CCDs", Proc. SPIE 3019, Solid State Sensor Arrays: Development and Applications, (25 April 1997); https://doi.org/10.1117/12.275165

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