Simulation of resist heating in electron-beam lithography

Sergey V. Babin; Igor Yu. Kuzmin

doi:10.1117/12.275801

7 July 1997 Simulation of resist heating in electron-beam lithography

Sergey V. Babin, Igor Yu. Kuzmin

Proceedings Volume 3048, Emerging Lithographic Technologies; (1997) https://doi.org/10.1117/12.275801
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

A mathematical model of resist heating was developed to anticipate the resist temperature rise during electron exposure. This model that takes into consideration the heat propagation in both resist and substrate, each of which may consist of a number of layers. A tabulation of special functions used for numerical calculation allows the analytical solution to be simplified to a single integral for both a variably shaped beam and a Gaussian beam. As a result, a dynamic distribution of a temperature field in resist can be simulated for an exposure process in terms of thickness and characteristics of the resist and multilayer substrate, as well as size, placement, and sequence of flashes. Results of simulations are shown for both short and long exposure periods. It was demonstrated that heat from the substrate does not contribute noticeably at the beginning of the high throughput exposure at 50 kV, whereas heating of the resist itself is significant and highly nonuniform throughout the depth of the resist.

Citation Download Citation

Sergey V. Babin and Igor Yu. Kuzmin "Simulation of resist heating in electron-beam lithography", Proc. SPIE 3048, Emerging Lithographic Technologies, (7 July 1997); https://doi.org/10.1117/12.275801

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available