UV-laser-induced polymer ablation: the role of volatile species

M. Himmelbauer; Nikita M. Bityurin; Boris S. Luk'yanchuk; Nikita Arnold; Dieter Baeuerle

doi:10.1117/12.271677

4 April 1997 UV-laser-induced polymer ablation: the role of volatile species

M. Himmelbauer, Nikita M. Bityurin, Boris S. Luk'yanchuk, Nikita Arnold, Dieter Baeuerle

Proceedings Volume 3093, Nonresonant Laser-Matter Interaction (NLMI-9); (1997) https://doi.org/10.1117/12.271677
Event: Nonresonant Laser-Matter Interaction, 1996, St. Petersburg, Russian Federation

Abstract

Single-shot laser ablation of polyimide has been investigated with UV Ar⁺-laser radiation (lambda approximately equals 302 nm) for pulse lengths between 140 ns and 5000 ns. The dependences of the ablation rate on laser pulse length and intensity were measured by means of an atomic force microscope (AFM). These data are compared with mass-loss measurements using a microbalance. The experimental data are analyzed by taking into account both mass losses related to volatile product species and real material ablation.

Citation Download Citation

M. Himmelbauer, Nikita M. Bityurin, Boris S. Luk'yanchuk, Nikita Arnold, and Dieter Baeuerle "UV-laser-induced polymer ablation: the role of volatile species", Proc. SPIE 3093, Nonresonant Laser-Matter Interaction (NLMI-9), (4 April 1997); https://doi.org/10.1117/12.271677

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