Current status of the SR stepper development

Nobutoshi Mizusawa; Yutaka Watanabe; Shinichi Hara; Kenji Saitoh; Hiroshi Maehara; Mitsuaki Amemiya; Shunichi Uzawa

doi:10.1117/12.277256

28 July 1997 Current status of the SR stepper development

Nobutoshi Mizusawa, Yutaka Watanabe, Shinichi Hara, Kenji Saitoh, Hiroshi Maehara, Mitsuaki Amemiya, Shunichi Uzawa

Proceedings Volume 3096, Photomask and X-Ray Mask Technology IV; (1997) https://doi.org/10.1117/12.277256
Event: Photomask Japan '97, 1997, Kawasaki City, Japan

Abstract

We describe some results of exposure experiments using the present prototype SR stepper which Canon has developed and also describe the novel technology development which is necessary to establish the next generation SR stepper for volume production. In the evaluation of the prototype machine, alignment performance, stage accuracy, and printing performance were examined, and we found the SR lithography can be applied to manufacturing devices beyond 0.15 micrometer level. In the technology development for the production machine, we have examined methods related to masks; they are reduction of thermal expansion, suppression out-of-plane displacement of mask membrane, and magnification correction. As a result of the examinations, we have a good perspective in development of a high-throughput SR stepper which is suitable for the production beyond 1 G-bit DRAM.

Citation Download Citation

Nobutoshi Mizusawa, Yutaka Watanabe, Shinichi Hara, Kenji Saitoh, Hiroshi Maehara, Mitsuaki Amemiya, and Shunichi Uzawa "Current status of the SR stepper development", Proc. SPIE 3096, Photomask and X-Ray Mask Technology IV, (28 July 1997); https://doi.org/10.1117/12.277256

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available