Ray-tracing-based phase elements as tools for CO2 laser beam profile homogenization: influence of different parameters and ranges of tolerances

Michael Rudolf Duparre; Michael A. Golub; Barbara Luedge; Richard M. Kowarschik; Ernst-Bernhard Kley; Hans-Joerg Fuchs

doi:10.1117/12.295138

1 November 1997 Ray-tracing-based phase elements as tools for CO2 laser beam profile homogenization: influence of different parameters and ranges of tolerances

Michael Rudolf Duparre, Michael A. Golub, Barbara Luedge, Richard M. Kowarschik, Ernst-Bernhard Kley, Hans-Joerg Fuchs

Author Affiliations +

Proceedings Volume 3134, Optical Manufacturing and Testing II; (1997) https://doi.org/10.1117/12.295138
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Modulo-2(pi) phase elements calculated by relatively simple ray-tracing methods turned out to be suitable tools for laser beam profile homogenization under certain preconditions. As an example, we present results of the transformation of a Gaussian TEM₀₀-input beam with (lambda) equals 10.6 micrometers into a box-shaped intensity profile which has to be generate in the so called focal plane at a given distance from the element. The manufacturing of the investigated elements was realized by electron-beam lithography in combination with reactive ion etching. For computer modeling of the behavior of these elements a FFT- algorithm was used, working on the basis of paraxial approximation of the Kirchhoff-integral. The quality of achieved beam shaping depends of several parameters covering effects which are design-dependent, input-beam dependent, set-up dependent, or technology dependent. In an earlier paper we investigated the influence of varying beam waist diameter and beam waist position for a given element as well as of varying distance of the plane under investigation from the designed focal plane. In the present paper the interest is focused onto the influence of varying size of the element's clear aperture and of technologically caused deviations of realized step heights from the design values for the multi-level binary profile. Evaluation criteria were the lateral intensity distribution as well as the quantities diffraction efficiency and mean square amplitude deviation.

Citation Download Citation

Michael Rudolf Duparre, Michael A. Golub, Barbara Luedge, Richard M. Kowarschik, Ernst-Bernhard Kley, and Hans-Joerg Fuchs "Ray-tracing-based phase elements as tools for CO2 laser beam profile homogenization: influence of different parameters and ranges of tolerances", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); https://doi.org/10.1117/12.295138

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
11 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Beam shaping

Chemical elements

Photomasks

Computer simulations

Etching

Gaussian beams

Diffraction

Show All Keywords

Keywords/Phrases

Search In:

Publication Years