Goniometric optical scatter instrument for bidirectional reflectance distribution function measurements with out-of-plane and polarimetry capabilities

Thomas A. Germer; Clara C. Asmail

doi:10.1117/12.279240

26 September 1997 Goniometric optical scatter instrument for bidirectional reflectance distribution function measurements with out-of-plane and polarimetry capabilities

Thomas A. Germer, Clara C. Asmail

Author Affiliations +

Proceedings Volume 3141, Scattering and Surface Roughness; (1997) https://doi.org/10.1117/12.279240
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

A goniometric optical scatter instrument has been developed at the National Institute of Standards and Technology which can readily perform out-of-plane measurements of optical scatter as well as polarimetric measurements. This paper uses the description of this instrument as a platform to discuss key issues that must be addressed when developing either out-of- plane measurement capabilities or polarimetric capabilities, or both at the same time. The transformation from the sample coordinates to the instrument coordinates has been carried out, including the rotation of the polarization coordinates for out-of-plane measurements. The out-of-plane instrument signature that results from Rayleigh scatter in air is calculated and compared with measurement. Finally, the results of some out-of-plane Mueller matrix BRDF measurements of the backside of a silicon wafer are presented.

Citation Download Citation

Thomas A. Germer and Clara C. Asmail "Goniometric optical scatter instrument for bidirectional reflectance distribution function measurements with out-of-plane and polarimetry capabilities", Proc. SPIE 3141, Scattering and Surface Roughness, (26 September 1997); https://doi.org/10.1117/12.279240

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