Paper
3 October 1997 Pulsed laser deposition: today and tomorrow
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Abstract
An analysis of actual state of a view about pulsed laser deposition method, its applications and perspectives and also physical phenomena during laser deposition processing were presented.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Slawomir Maksymilian Kaczmarek "Pulsed laser deposition: today and tomorrow", Proc. SPIE 3187, Laser Technology V: Applications in Materials Sciences and Engineering, (3 October 1997); https://doi.org/10.1117/12.287828
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CITATIONS
Cited by 11 scholarly publications and 8 patents.
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KEYWORDS
Pulsed laser operation

Plasma

Thin films

Pulsed laser deposition

Laser ablation

Ferroelectric materials

Metals

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