Characterization of bulk-micromachined direct-bonded silicon nanofilters

Jay K. Tu; Tony Huen; Robert Szema; Mauro Ferrari

doi:10.1117/12.304374

26 March 1998 Characterization of bulk-micromachined direct-bonded silicon nanofilters

Jay K. Tu, Tony Huen, Robert Szema, Mauro Ferrari

Proceedings Volume 3258, Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications; (1998) https://doi.org/10.1117/12.304374
Event: BiOS '98 International Biomedical Optics Symposium, 1998, San Jose, CA, United States

Abstract

The ability to separate 30-100 nm particles - nanofiltration - is critical for many biomedical applications. Where this filtration needs to be absolute, such as for viral elimination in the blood fractionation process, the large variations in pore size found with conventional polymeric filters can lead to the unwanted presence of viruses in the filtrate. To overcome this problem, we have developed a filter with micromachined channels sandwiched between two bonded silicon wafers. These channels are formed through the selective deposition and then removal of a thermally-grown oxide, the thickness of which can be controlled to +/- 4 percent for 30 nm pores. In this paper, we will present both the gas and liquid characterization, and the filtration studies done on 44 and 100 nm beads.

Citation Download Citation

Jay K. Tu, Tony Huen, Robert Szema, and Mauro Ferrari "Characterization of bulk-micromachined direct-bonded silicon nanofilters", Proc. SPIE 3258, Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications, (26 March 1998); https://doi.org/10.1117/12.304374

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available