Femtosecond lasers and their implications for materials processing

Paul B. Corkum

doi:10.1117/12.309498

3 June 1998 Femtosecond lasers and their implications for materials processing

Paul B. Corkum

Proceedings Volume 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III; (1998) https://doi.org/10.1117/12.309498
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

As a result of rapid engineering progress, femtosecond lasers will soon be available for industrial applications such as micro machining. I will review the physics behind laser machining of metals, semiconductors and transparent materials. Then I will briefly discuss the current state-of- the-art in femtosecond laser technology of interest to micro machining.

Citation Download Citation

Paul B. Corkum "Femtosecond lasers and their implications for materials processing", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); https://doi.org/10.1117/12.309498

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