New developments of pulsed-laser deposition process

Tatsuo Okada; Yoshiki Nakata; Junichi Muramoto; Mitsuo Maeda

doi:10.1117/12.309518

3 June 1998 New developments of pulsed-laser deposition process

Tatsuo Okada, Yoshiki Nakata, Junichi Muramoto, Mitsuo Maeda

Proceedings Volume 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III; (1998) https://doi.org/10.1117/12.309518
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

This paper describes the studies on nanoparticle synthesis process by the laser ablation in a background gas and the metal film deposition by the laser-induced forward transfer (LIFT) technique. In order to understand and control the processes, an imaging diagnostic system has been developed. Firstly, the behavior of nanoparticles in a laser ablation plume was studied with the imaging system. The attempt to control the nanoparticle behavior was examined. Next, the metal film deposition by the LIFT technique was studied with the different laser-pulse duration from 160 fs to 60 ms. The results are reported along with the imaging observation of the LIFT process.

Citation Download Citation

Tatsuo Okada, Yoshiki Nakata, Junichi Muramoto, and Mitsuo Maeda "New developments of pulsed-laser deposition process", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); https://doi.org/10.1117/12.309518

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available