Combined measurement of silicon microbeams by grating interferometry and digital holography

Werner P. O. Jueptner; Malgorzata Kujawinska; Wolfgang Osten; Leszek A. Salbut; Soenke Seebacher

doi:10.1117/12.323338

29 September 1998 Combined measurement of silicon microbeams by grating interferometry and digital holography

Werner P. O. Jueptner, Malgorzata Kujawinska, Wolfgang Osten, Leszek A. Salbut, Soenke Seebacher

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323338
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

In this paper the methodology and instrumentation for the investigation of the silicon microbeam behavior under tensile and bending loads are described. The tests are performed by means of Automated Grating Interferometry (AGI) and Digital Holography (DH). Both methods deliver a direct approach to a highly sensitive measurement of surface displacements. In combination with simulation tools (analytical or FEM models) the material parameters can be determined. Consequently the main aim of the measurements is to determine the three Cartesian components of the displacement vector.

Citation Download Citation

Werner P. O. Jueptner, Malgorzata Kujawinska, Wolfgang Osten, Leszek A. Salbut, and Soenke Seebacher "Combined measurement of silicon microbeams by grating interferometry and digital holography", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323338

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