Pulsedlaser deposition and laser machining of diamondlike carbon films

Sergio Martellucci; Giovanni Messina; A. Paoletti; Maria Richetta; S. Santangelo; A. Spena; Antonello Tebano; A. Tucciarone

doi:10.1117/12.316604

14 July 1998 Pulsed laser deposition and laser machining of diamondlike carbon films

Sergio Martellucci, Giovanni Messina, A. Paoletti, Maria Richetta, S. Santangelo, A. Spena, Antonello Tebano, A. Tucciarone

Author Affiliations +

Proceedings Volume 3423, Second GR-I International Conference on New Laser Technologies and Applications; (1998) https://doi.org/10.1117/12.316604
Event: Second GR-I International Conference on New Laser Technologies and Applications, 1997, Olympia, Greece

Abstract

Recently the application of pulsed laser deposition (PLD) technique to grow different material of relevant interest for applications, especially in the field of micro devices, has been considered. We show that thin films of diamond like carbon (DLC) can be grown by means of the PLD technique, using an XeCl excimer laser. Their characterization was carried out by SEM, Raman spectroscopy and microindenter. We started a study on the etching mechanism of DLC films for possible applications in microsystems technology.

Citation Download Citation

Sergio Martellucci, Giovanni Messina, A. Paoletti, Maria Richetta, S. Santangelo, A. Spena, Antonello Tebano, and A. Tucciarone "Pulsed laser deposition and laser machining of diamondlike carbon films", Proc. SPIE 3423, Second GR-I International Conference on New Laser Technologies and Applications, (14 July 1998); https://doi.org/10.1117/12.316604

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