Scatterometer at Korea Research Institute of Standards and Science (KRISS) for bidirectional reflectance distribution function (BRDF)

Byong Chon Park; Yun Woo Lee; Beomhoan O

doi:10.1117/12.328472

30 October 1998 Scatterometer at Korea Research Institute of Standards and Science (KRISS) for bidirectional reflectance distribution function (BRDF)

Byong Chon Park, Yun Woo Lee, Beomhoan O

Author Affiliations +

Proceedings Volume 3426, Scattering and Surface Roughness II; (1998) https://doi.org/10.1117/12.328472
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

A description is given of the scatterometer which has been developed at KRISS for BRDF and diffraction pattern measurement. Light source, goniometer, and receiver is described. As a light source, the collimated HeNe and argon ion laser is used, with which the wavelengths of 632.8, 514.5, and 488.0 nm are available. The goniometer has 6 degrees of freedom. The precision of scattering polar angle is enhanced by choosing long rotation arm (length: 1.2 meter) placed on the stepmotor-controlled rotary table whose angle is read by the angle encoder with the resolution of 0.0001 degree and accuracy 0.001 degree. The receiver has a wide dynamic range greater than 10¹⁴ in intensity without intensity attenuation and receiver aperture change, which is made by cascading three kinds of detectors: photodiode (PD), photo- multiplier in direct current mode (DC), and photo-multiplier in pulse counting mode (PC). The measured instrument signature and the sinusoidal grating BRDF at the wavelength of 488 nm is presented.

Citation Download Citation

Byong Chon Park, Yun Woo Lee, and Beomhoan O "Scatterometer at Korea Research Institute of Standards and Science (KRISS) for bidirectional reflectance distribution function (BRDF)", Proc. SPIE 3426, Scattering and Surface Roughness II, (30 October 1998); https://doi.org/10.1117/12.328472

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available