Multilayer coatings with high reflectance in the EUV

Juan I. Larruquert; Ritva A. M. Keski-Kuha

doi:10.1117/12.330330

10 November 1998 Multilayer coatings with high reflectance in the EUV

Juan I. Larruquert, Ritva A. M. Keski-Kuha

Proceedings Volume 3445, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy IX; (1998) https://doi.org/10.1117/12.330330
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

Multilayer coatings with a small number of layers were designed to give an increase in normal incidence reflectance in the extreme UV over that of the available single layer coatings. Multilayer coatings based on Al, MgF₂ and SiC or B₄C showed higher reflectance than single layers of SiC and B₄C in the spectral region from 57.9 nm to 121.6 nm H Lyman (alpha) line and above. The major increase in reflectance was obtained at wavelengths close to 121.6 nm. Reflectance degraded slightly over time in the same way as single way as single layer coatings. Preliminary result have recently been obtained wit a second design based on a superposition of films of increasing refractive index form outermost to innermost layer, e.g. with multilayer coatings of SiC on B₄C on diamond-like carbon. A combination of both designs, with multilayer coatings of the type Al/MgF₂/DLC/B₄C/SiC, results in further increase in the EUV reflectance, although their stability has not been determined yet.

Citation Download Citation

Juan I. Larruquert and Ritva A. M. Keski-Kuha "Multilayer coatings with high reflectance in the EUV", Proc. SPIE 3445, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy IX, (10 November 1998); https://doi.org/10.1117/12.330330

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