X-ray microfocusing by a Ti/Al multilayer zone plate and a Bragg-Fresnel lens

Masaki Koike; Isao H. Suzuki; Satoshi Komiya

doi:10.1117/12.330339

6 November 1998 X-ray microfocusing by a Ti/Al multilayer zone plate and a Bragg-Fresnel lens

Masaki Koike, Isao H. Suzuki, Satoshi Komiya

Proceedings Volume 3449, X-Ray Microfocusing: Applications and Techniques; (1998) https://doi.org/10.1117/12.330339
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

A 1D Bragg-Fresnel lens for monochromatizing and focusing hard x-rays has been developed using a multilayer zone plate and a crystal. Ti and Al have ben chosen as material for phase modulation type zone plate. About 400 payers of Ti and Al were alternately deposited on a plane substrate according to the Fresnel's formula using a helicon plasma sputtering technique, in which Ar gas pressure was less than 1 mTorr. The total thickness of the layers is about 128 micrometers . The multilayered plane was sliced vertically and glued onto Ge(211) crystal, and thinned to about 10 micrometers . The synchrotron light source was focused one dimensionally, and the focal line width was measured by a knife edge scan techniques.

Citation Download Citation

Masaki Koike, Isao H. Suzuki, and Satoshi Komiya "X-ray microfocusing by a Ti/Al multilayer zone plate and a Bragg-Fresnel lens", Proc. SPIE 3449, X-Ray Microfocusing: Applications and Techniques, (6 November 1998); https://doi.org/10.1117/12.330339

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