Fabrication and characterization of integrated waveguide for use at G-band

G. M. Parkhurst; John W. Digby; M. Schrama; Arzhang Ardavan; J. Martyn Chamberlain; J. Singleton; Chris Collins; David Paul Steenson; Robert E. Miles; R. D. Pollard; John W. Bowen; N. J. Cronin

doi:10.1117/12.331156

13 November 1998 Fabrication and characterization of integrated waveguide for use at G-band

G. M. Parkhurst, John W. Digby, M. Schrama, Arzhang Ardavan, J. Martyn Chamberlain, J. Singleton, Chris Collins, David Paul Steenson, Robert E. Miles, R. D. Pollard, John W. Bowen, N. J. Cronin

Author Affiliations +

Proceedings Volume 3465, Millimeter and Submillimeter Waves IV; (1998) https://doi.org/10.1117/12.331156
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

The fabrication of air-filled rectangular metal-pipe waveguide using a lithographically-based technique has recently been reported. This type of waveguide, together with other passive components such as antennas, couplers, mixers and filters may offer a realistic route to terahertz frequency integrated circuits in view of the compatibility of the fabrication technique with those of standard semiconductor processing. In this contribution, we report the fabrication of a range of waveguide components for operation at frequencies of up to 300 GHz. These measurements represent the highest frequency characterization study so far reported for a micromachined passive structure of this type and provide proof of TE₁₀ propagation with the expected cut-off frequency. Numerous measurements have been taken using G-band (WR-F) guide which show an attenuation loss of approximately 0.6 dB per guide wavelength at 200 GHz. This low value of attneuation shows that these micromachined waveguide are viable components for use in integrated circuits at terahertz frequencies. The insertion loss repeatability (due to mismatch effects at the ports of the waveguides) has been measured and has been shown to be better than plus or minus 0.5 dB. Preliminary results are presented for J-band (WR-3) waveguide which clearly shows the cut off frequency.

Citation Download Citation

G. M. Parkhurst, John W. Digby, M. Schrama, Arzhang Ardavan, J. Martyn Chamberlain, J. Singleton, Chris Collins, David Paul Steenson, Robert E. Miles, R. D. Pollard, John W. Bowen, and N. J. Cronin "Fabrication and characterization of integrated waveguide for use at G-band", Proc. SPIE 3465, Millimeter and Submillimeter Waves IV, (13 November 1998); https://doi.org/10.1117/12.331156

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
5 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Waveguides

Signal attenuation

Integrated circuits

Antennas

Fabrication

Gold

Imaging spectroscopy

Show All Keywords

Keywords/Phrases

Search In:

Publication Years