Paper
10 September 1998 Fluid-coupled hollow metallic micromachined needle arrays
John D. Brazzle, Ian Papautsky, A. Bruno Frazier
Author Affiliations +
Proceedings Volume 3515, Microfluidic Devices and Systems; (1998) https://doi.org/10.1117/12.322073
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
Abstract
In this paper, fluid coupled metallic micromachined needle arrays are designed, fabricated, and characterized. The described hollow metallic needle arrays include design features such as dual structural supports and needle coupling channels. The supports and needle walls are formed by micro-electroformed metal to provide increased structural integrity. The needle coupling channels are used to fluidically interconnect the needles and allow pressure equalization and balance of fluid flow between needles. In addition, the needle coupling channels minimize the effects of restricted needle passages by providing a redistribution point for fluid flow between them. The optimum design for the needle coupling channels is investigated using an ANSYS finite element numerical model. The significance of this work includes the development of hollow, metallic micromachined needle arrays for biomedical applications, as well as, a discussion of structural, fluidic, and biological design considerations.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John D. Brazzle, Ian Papautsky, and A. Bruno Frazier "Fluid-coupled hollow metallic micromachined needle arrays", Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); https://doi.org/10.1117/12.322073
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Cited by 18 scholarly publications.
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KEYWORDS
Microfluidics

Silicon

Photoresist materials

Skin

Metals

Biomedical optics

Micromachining

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