Realization of spherical absolute testing

Qingyun Wang; Rihong Zhu; Jinbang Chen; Lei Chen

doi:10.1117/12.318400

10 August 1998 Realization of spherical absolute testing

Qingyun Wang, Rihong Zhu, Jinbang Chen, Lei Chen

Proceedings Volume 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II; (1998) https://doi.org/10.1117/12.318400
Event: Photonics China '98, 1998, Beijing, China

Abstract

Today, high quantities lens is more and more important to the optic-electric fields, and it brought about the demand of high accuracy testing of spherical surfaces. Absolute interferometric testing of spherical surfaces is a technical basis for establishing the spherical standard, and it is also an important application of computer aid interferometry. Partly work in the course of establishing the national spherical standard is introduced. A new method based on image processing has been developed instead of typical absolute testing which requires an eight-dimension mount whose cost is expensive and adjustment is very difficult. Interferograms sampled by phase-shifting interferometry can be processed to recognize the border of spherical surfaces. The key coefficients of position are in real time feedback to the operator to adjusting sphere precisely relative to the interferometer. This method can get more accuracy because of the high unison of three interferograms. This paper shows results of testing a 1/10 wave P-V sphere using two aplanats. It is easy to measure spherical surfaces to the accuracy better than 1/15 wave p- v.

Citation Download Citation

Qingyun Wang, Rihong Zhu, Jinbang Chen, and Lei Chen "Realization of spherical absolute testing", Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); https://doi.org/10.1117/12.318400

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