Timing of the x-ray preionization of a discharge-pumped ArF excimer laser with different excitation circuits

L. Feenstra; O. B. Hoekstra; Peter J. M. Peters; Wilhelmus J. Witteman

doi:10.1117/12.334503

22 December 1998 Timing of the x-ray preionization of a discharge-pumped ArF excimer laser with different excitation circuits

L. Feenstra, O. B. Hoekstra, Peter J. M. Peters, Wilhelmus J. Witteman

Author Affiliations +

Proceedings Volume 3574, XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (1998) https://doi.org/10.1117/12.334503
Event: Twelfth International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, 1998, St. Petersburg, Russian Federation

Abstract

An ArF excimer laser has been operated using four different spiker-sustainer excitation circuits. We report on the large differences in the laser output energy caused by nanosecond- scale variations in the preionization timing with each circuit.

Citation Download Citation

L. Feenstra, O. B. Hoekstra, Peter J. M. Peters, and Wilhelmus J. Witteman "Timing of the x-ray preionization of a discharge-pumped ArF excimer laser with different excitation circuits", Proc. SPIE 3574, XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (22 December 1998); https://doi.org/10.1117/12.334503

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available