Surface-micromachined electrostatic deflector for wideband tunable WDDM filtering

Yang-Yu Fan; Jeffery J. Maki; Ray T. Chen

doi:10.1117/12.344626

13 April 1999 Surface-micromachined electrostatic deflector for wideband tunable WDDM filtering

Yang-Yu Fan, Jeffery J. Maki, Ray T. Chen

Proceedings Volume 3632, Optoelectronic Interconnects VI; (1999) https://doi.org/10.1117/12.344626
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

We report a surface-micromachined electrostatic deflector as a controlling element for a novel micro-opto-electro- mechanical (MOEM) bandpass tunable filter for a wavelength- division-multiplexed optical-fiber sensor system. Such a tunable MOEM filter involves multiplexed volume holograms, a surface micromachined electrostatic deflector, and an array of Si photodetectors. The micromachined electrostatic deflector, providing fast and repeatable adjustments, greatly enhances the dynamic tuning range of the filter. To micromachine the electrostatic deflector, we use thick photoresist as a sacrificial layer that is patterned using conventional microlithography, followed by electroplating. Ten deflectors with different lengths have been fabricated, and the electrostatic actuation of each device has been demonstrated. DuPont photopolymer film is employed for forming multiplexed volume holograms, which in conjunction with a photodetector array will allow the filter to operate at many wavelength windows. The incorporation of the multiplexed volume hologram with the electrostatic deflector will allow us to tune dynamically the filter.

Citation Download Citation

Yang-Yu Fan, Jeffery J. Maki, and Ray T. Chen "Surface-micromachined electrostatic deflector for wideband tunable WDDM filtering", Proc. SPIE 3632, Optoelectronic Interconnects VI, (13 April 1999); https://doi.org/10.1117/12.344626

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