Paper
27 April 1999 Shearing-interferometer-based smart-pixel adaptive optics chip
Author Affiliations +
Abstract
An adaptive optics system is being developed, which uses integrated circuit technology along with diffractive optics to crete a very compact system. A lenslet array focuses incoming light onto individual actuators. Phase modulation is applied with electrostatic attraction. Gratings on the mirrors split off a part of the light for wavefront sampling. Optics on the back side of the lenslet array combine neighboring beams and focus onto detector elements. This creates a shearing measurement in two orthogonal directions. A resistive grid network reconstructs the wavefront from the individual measurements, and a feedback system nulls the outgoing wave. This paper contains simulations and analysis of the system. A 1D array was simulated, including the wavefront measurement and correction. A sine wave was input to the system, and the resulting phase and point spread function were calculated. System analysis of the wavefront reconstruction and feedback are discussed. Test results for a non-shearing interferometer are presented. Some test results from a test chip are also provided.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jay A. Hammer, Gregg T. Borek, and Rodney L. Clark "Shearing-interferometer-based smart-pixel adaptive optics chip", Proc. SPIE 3649, Sensors, Cameras, and Systems for Scientific/Industrial Applications, (27 April 1999); https://doi.org/10.1117/12.347070
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KEYWORDS
Mirrors

Sensors

Photodiodes

Wavefronts

Adaptive optics

Actuators

Integrated optics

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