Micro-electro-mechanical actuator with extended range and enhanced force: fabrication, test, and application as a mechanical scanner

Stephen M. Bobbio; Stephen W. Smith; Jason M. Zara; Scott H. Goodwin-Johansson; John A. Hudak; Thomas D. DuBois; Harry J. Leamy; Jennifer Godwin; M. Pennington

doi:10.1117/12.354271

20 July 1999 Micro-electro-mechanical actuator with extended range and enhanced force: fabrication, test, and application as a mechanical scanner

Stephen M. Bobbio, Stephen W. Smith, Jason M. Zara, Scott H. Goodwin-Johansson, John A. Hudak, Thomas D. DuBois, Harry J. Leamy, Jennifer Godwin, M. Pennington

Author Affiliations +

Proceedings Volume 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS; (1999) https://doi.org/10.1117/12.354271
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

A miniature ultrasound scanner has been constructed using a MEMS actuator called an Integrated Force Array. A second type of actuator called a Spiral Wound Transducer (SWT) is under development and shows significant promise for this application. Both the scanner and SWT will be discussed.

Citation Download Citation

Stephen M. Bobbio, Stephen W. Smith, Jason M. Zara, Scott H. Goodwin-Johansson, John A. Hudak, Thomas D. DuBois, Harry J. Leamy, Jennifer Godwin, and M. Pennington "Micro-electro-mechanical actuator with extended range and enhanced force: fabrication, test, and application as a mechanical scanner", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); https://doi.org/10.1117/12.354271

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