From circuit to microsystems: using a transformer-equivalent circuit to study a piezoelectric actuator

F. Oms-Elisabelar; Christian Bergaud; L. Nicu

doi:10.1117/12.341228

10 March 1999 From circuit to microsystems: using a transformer-equivalent circuit to study a piezoelectric actuator

F. Oms-Elisabelar, Christian Bergaud, L. Nicu

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341228
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

A transformer equivalent circuit is used to represent a piezo-actuator. The circuit is developed starting from electromechanical transduction principles and included in SPICE software. The actuator is a length-expanded cantilever. Analytical and simulated results are compared and found in god agreement both in static and dynamic studies.

Citation Download Citation

F. Oms-Elisabelar, Christian Bergaud, and L. Nicu "From circuit to microsystems: using a transformer-equivalent circuit to study a piezoelectric actuator", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341228

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