Optimization of cantilever probes for atomic force microscopy

Niels F. Pedersen

doi:10.1117/12.341154

10 March 1999 Optimization of cantilever probes for atomic force microscopy

Niels F. Pedersen

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341154
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

A cantilever beam use din an Atomic Force Microscope is optimized with respect to performance. The first goal of the optimization is to maximize the first eigen frequency, the second goal is to maximize tip angle of the probe in either the static deflection mode or the first eigenmode. During the optimization we will constrain the stiffness of the probe to be constant. In the optimization, the angel is used as the objective but the maximization of the angel will also results in increased first eigen-frequency. Adding a restriction on the second eigen frequency, result in a significant change of the shape. The beam is modeled with 12 DOF beam finite elements and the optimizations are carried out with MMA.

Citation Download Citation

Niels F. Pedersen "Optimization of cantilever probes for atomic force microscopy", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341154

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available