Absolute measurement of a spherical surface using a point diffraction interferometer

Katsura Otaki; Florian Bonneau; Yutaka Ichihara

doi:10.1117/12.347755

7 May 1999 Absolute measurement of a spherical surface using a point diffraction interferometer

Katsura Otaki, Florian Bonneau, Yutaka Ichihara

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347755
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

Absolute measurement of spherical surface by use of point diffraction interferometer (PDI) has been studied both theoretically and experimentally. By the estimation of optical error, 10^-3 (lambda) rms can be expected as absolute accuracy. Experimental results with high accuracy have been obtained.

Citation Download Citation

Katsura Otaki, Florian Bonneau, and Yutaka Ichihara "Absolute measurement of a spherical surface using a point diffraction interferometer", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347755

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