Recent advances in EUV phase-shifting point diffraction interferometry

Patrick P. Naulleau; Kenneth A. Goldberg; Sang Hun Lee; Chang-Hasnain C. Chang; Phillip J. Batson; David T. Attwood Jr.; Jeffrey Bokor

doi:10.1117/12.371113

23 November 1999 Recent advances in EUV phase-shifting point diffraction interferometry

Patrick P. Naulleau, Kenneth A. Goldberg, Sang Hun Lee, Chang-Hasnain C. Chang, Phillip J. Batson, David T. Attwood Jr., Jeffrey Bokor

Author Affiliations +

Proceedings Volume 3767, EUV, X-Ray, and Neutron Optics and Sources; (1999) https://doi.org/10.1117/12.371113
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

The extreme ultraviolet (EUV) phase-shifting point diffraction interferometer (PS/PDI) was developed and implemented at Lawrence Berkeley National Laboratory to meet the significant measurement challenge of characterizing EUV projection lithography optics. The PS/PDI has been in continuous use and under ongoing development since 1996. Here we describe recent improvements made to the interferometer, and we summarize metrology results from state-of-the-art 10x-reduction EUV projection optics.

Citation Download Citation

Patrick P. Naulleau, Kenneth A. Goldberg, Sang Hun Lee, Chang-Hasnain C. Chang, Phillip J. Batson, David T. Attwood Jr., and Jeffrey Bokor "Recent advances in EUV phase-shifting point diffraction interferometry", Proc. SPIE 3767, EUV, X-Ray, and Neutron Optics and Sources, (23 November 1999); https://doi.org/10.1117/12.371113

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