Diffraction grating groove analysis used to predict efficiency and scatter performance

David A. Content

doi:10.1117/12.363756

17 September 1999 Diffraction grating groove analysis used to predict efficiency and scatter performance

David A. Content

Proceedings Volume 3778, Gradient Index, Miniature, and Diffractive Optical Systems; (1999) https://doi.org/10.1117/12.363756
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Atomic force microscopy and other advanced metrology tools now allow detailed determination of the groove profiles and surface morphology of diffraction gratings and other diffractive structures. Modern electromagnetic models allow prediction of the efficiency performance of diffraction gratings in many applications. In addition, tools exist to predict the scatter from low roughness mirrors such as are used for ultraviolet to X-ray optical systems. We describe a program to apply these tools and software developed using commercial off the shelf tools such as IDL and PcGrate to a highly selected set of diffraction gratings developed for the HST/STIS instruments. Both efficiency and scatter predictions are compared with experimental data.

Citation Download Citation

David A. Content "Diffraction grating groove analysis used to predict efficiency and scatter performance", Proc. SPIE 3778, Gradient Index, Miniature, and Diffractive Optical Systems, (17 September 1999); https://doi.org/10.1117/12.363756

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