Calculation of an iris size in 24-in. Fizeau interferometer

Sen Han

doi:10.1117/12.369225

11 November 1999 Calculation of an iris size in 24-in. Fizeau interferometer

Sen Han

Proceedings Volume 3782, Optical Manufacturing and Testing III; (1999) https://doi.org/10.1117/12.369225
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

In a 24' phase shifting Fizeau interferometer designed and built by Veeco Metrology, coherent imaging method, which is different from one in conventional interferometers, is adopted. To decrease the some of the fixed pattern noise caused by dust on the optics within imaging system, which affects on transfer function, and to eliminate the reflections from the wedge of test glass in the measurement of homogeneity, an iris should be placed at the focal plane before final imaging lens. Its size depends both on the transfer function requirement and on the wedge angle of the test glass.

Citation Download Citation

Sen Han "Calculation of an iris size in 24-in. Fizeau interferometer", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369225

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