High-aspect-ratio submicron microstructures in LiNbO3: fabrication and potential applications to photonic devices

Shizhuo Yin

doi:10.1117/12.364007

1 October 1999 High-aspect-ratio submicron microstructures in LiNbO₃: fabrication and potential applications to photonic devices

Shizhuo Yin

Author Affiliations +

Proceedings Volume 3805, Photonic Devices and Algorithms for Computing; (1999) https://doi.org/10.1117/12.364007
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Fabrication of high aspect ratio submicron to nanometer range micro structures in LiNbO₃ using a state of the art Schlumberger AMS 3000 focused ion beam system is presented. The submicron structures with about 350 nm width and 1600 nm depth are fabricated by employing XeF₂ gas assisted Gallium ion beam etching with 50 pA of ion beam current. A variety of opto-electronic devices such as micro sensors, directional couplers, extremely compact electro- optic modulators and wavelength filters could be built based on this type of high aspect ratio submicron structures in LiNbO₃, which may lead to the next generation of integrated opto-electronic devices that have higher levels of device integration and enhanced functionality.

Citation Download Citation

Shizhuo Yin "High-aspect-ratio submicron microstructures in LiNbO₃: fabrication and potential applications to photonic devices", Proc. SPIE 3805, Photonic Devices and Algorithms for Computing, (1 October 1999); https://doi.org/10.1117/12.364007

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