Qualification of optical measurement techniques for the investigation of material parameters of microcomponents

Wolfgang Osten; Werner P. O. Jueptner; Soenke Seebacher; Torsten Baumbach

doi:10.1117/12.364297

15 September 1999 Qualification of optical measurement techniques for the investigation of material parameters of microcomponents

Wolfgang Osten, Werner P. O. Jueptner, Soenke Seebacher, Torsten Baumbach

Author Affiliations +

Proceedings Volume 3825, Microsystems Metrology and Inspection; (1999) https://doi.org/10.1117/12.364297
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

The growing development of modern microcomponents, structures and systems, makes it necessary to qualify large-scale approved measurement methods for the investigation in micro- scales. New materials and structural design are employed whose behavior cannot be easily predicted by FE-methods. Material properties and boundary conditions which are known form large- scale investigations may differ considerably for components with micro-scale dimensions. Other problems are due to the high aspect ratio of the micro structures which makes it necessary to consider the real shape of the component especially for reliability studies. Consequently a wide field has been opened for optical and dimensional metrology with respect to the investigation of microcomponents. Many methods which were tested successfully at big components can be used for microcomponents, too. But new ways must be followed especially in the field of loading, handling and observing micro-scale components. The article deals with optical techniques which have proven to be useful for the investigation of large-scale components and their qualification for the investigation of microcomponents. For the discussion the 3 problem classes mentioned above are taken into account.

Citation Download Citation

Wolfgang Osten, Werner P. O. Jueptner, Soenke Seebacher, and Torsten Baumbach "Qualification of optical measurement techniques for the investigation of material parameters of microcomponents", Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); https://doi.org/10.1117/12.364297

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available