Multi-Element Thin Film Chemical Microsensors

Imants Lauks

doi:10.1117/12.934992

8 November 1983 Multi-Element Thin Film Chemical Microsensors

Imants Lauks

Proceedings Volume 0387, Technology of Stratified Media; (1983) https://doi.org/10.1117/12.934992
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States

Abstract

A review of the science and technology of chemical sensing using planar micro-fabricated thin film potentiometric electrodes is presented. Those aspects of technology of stratified media that are especially peculiar to this class of structures, namely fabrication of thin film composites consisting of inoraanics, organics, gels and heterogeneous mixtures of these on planar electronic substrates are discussed. Problems encountered in patterning of this broad range of materials for the fabrication of chemical sensor arrays are emphasized.

Citation Download Citation

Imants Lauks "Multi-Element Thin Film Chemical Microsensors", Proc. SPIE 0387, Technology of Stratified Media, (8 November 1983); https://doi.org/10.1117/12.934992

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