Laser-plasma x-ray source using gas-target mixed fine particle

Tetsuya Matsui; Nobuyoshi Kogawa

doi:10.1117/12.375160

11 January 2000 Laser-plasma x-ray source using gas-target mixed fine particle

Tetsuya Matsui, Nobuyoshi Kogawa

Proceedings Volume 3886, High-Power Lasers in Energy Engineering; (2000) https://doi.org/10.1117/12.375160
Event: Advanced High-Power Lasers and Applications, 1999, Osaka, Japan

Abstract

We are developing laser plasma x-ray source for the extreme UV lithography. Our main idea is than fine particles, which sizes ar much smaller than the laser focal spot size, are used for the target of LPS. It is possible that this method has the higher x-ray conversion efficiency and low debris effect. Before the verification of this idea, the characteristics of LPS using the only gas puff target were investigated and tried the 100 Hz gas puff continuous operation until 10⁶ shots. In this operation, the long- term stability of the x-ray signal from 10⁵ shots to 10⁶ shots was about +/- 8 percent. In order to confirm our idea, we have selected SnO₂ fine particle that had a strong peak at 13.8 nm. It has found that the target of the gas mixed SnO₂ fine particle had two times higher x-ray intensity than the only Xe gas target at 13.6-14.0 nm. Therefore, it seems suitable for the Mo/Si multi-layer mirror system.

Citation Download Citation

Tetsuya Matsui and Nobuyoshi Kogawa "Laser-plasma x-ray source using gas-target mixed fine particle", Proc. SPIE 3886, High-Power Lasers in Energy Engineering, (11 January 2000); https://doi.org/10.1117/12.375160

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available