Micromachining of a three-dimensional submillimeter structure using an ultraviolet high-power laser and a five-axis stage

Yoshiyuki Kawamura

doi:10.1117/12.377027

7 February 2000 Micromachining of a three-dimensional submillimeter structure using an ultraviolet high-power laser and a five-axis stage

Yoshiyuki Kawamura

Author Affiliations +

Proceedings Volume 3888, High-Power Lasers in Manufacturing; (2000) https://doi.org/10.1117/12.377027
Event: Advanced High-Power Lasers and Applications, 1999, Osaka, Japan

Abstract

We have been developed a micromachining system which is composed of a pulsed ultraviolet laser and a five axis mechanical stage. Micro windmill which was composed of a windmill and a bearing and has been successfully fabricated as an example of the most simple mechanical element. The material was polyimide and the typical length was about 1 mm. Taking the advantages of the size effect, we have successfully obtained the maximum number of rotation of about 90,000 rpm by blowing Nitrogen gas from a small nozzle.

Citation Download Citation

Yoshiyuki Kawamura "Micromachining of a three-dimensional submillimeter structure using an ultraviolet high-power laser and a five-axis stage", Proc. SPIE 3888, High-Power Lasers in Manufacturing, (7 February 2000); https://doi.org/10.1117/12.377027

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