Micro tactile sensor with capacitive-inductive function for discrimination of object property

Katsunori Shida; Ryo Sato; Katsuya Higa; Tanemasa Asano

doi:10.1117/12.364456

29 September 1999 Micro tactile sensor with capacitive-inductive function for discrimination of object property

Katsunori Shida, Ryo Sato, Katsuya Higa, Tanemasa Asano

Proceedings Volume 3891, Electronics and Structures for MEMS; (1999) https://doi.org/10.1117/12.364456
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

We have developed multi-sensing artificial touch devices for the recognition of object properties and its surface situation. In this paper we present the fabrication of a thin-plate micro tactile sensor with two sensing functions of capacitance and inductance, and introduce the results of comparison of characteristics among various types of micro sensor distinctly depend on each size of the sensors, them material of electrodes, and the depth of insulating layer in the sensor. Furthermore, by preparing the shielding layer in the sensor in the way of the fabrication process, it was found that the problem which occurred in miniaturizing the sensor would be solved.

Citation Download Citation

Katsunori Shida, Ryo Sato, Katsuya Higa, and Tanemasa Asano "Micro tactile sensor with capacitive-inductive function for discrimination of object property", Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); https://doi.org/10.1117/12.364456

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available