3C(beta)-SiC-on-insulator waveguide structures for modulators and sensor systems

Adrian P. Vonsovici; Graham T. Reed; Mike R. Josey; Paul R. Routley; Alan G. R. Evans; Fereydoon Namavar

doi:10.1117/12.370332

12 November 1999 3C(beta)-SiC-on-insulator waveguide structures for modulators and sensor systems

Adrian P. Vonsovici, Graham T. Reed, Mike R. Josey, Paul R. Routley, Alan G. R. Evans, Fereydoon Namavar

Proceedings Volume 3896, Design, Fabrication, and Characterization of Photonic Devices; (1999) https://doi.org/10.1117/12.370332
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

In this work planar and rib (beta) -SiC-on-insulator waveguides were investigated. The waveguides were fabricated by two different methods. In the first a technological process similar to that of SIMOX was used, a buried SiO₂ layer was formed by a two-step high-energy ion implantation of oxygen in SiC/Si wafers. For the second type of waveguides we used heteroepitaxy of SiC on SOI. The losses have been measured at 1.3 and 1.55micrometers . Rib waveguides were fabricated using dry-etching. These types of waveguides have great potential for high-speed silicon-based photonic devices compatible with silicon technology.

Citation Download Citation

Adrian P. Vonsovici, Graham T. Reed, Mike R. Josey, Paul R. Routley, Alan G. R. Evans, and Fereydoon Namavar "3C(beta)-SiC-on-insulator waveguide structures for modulators and sensor systems", Proc. SPIE 3896, Design, Fabrication, and Characterization of Photonic Devices, (12 November 1999); https://doi.org/10.1117/12.370332

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