Paper
9 November 1999 3D silicon infrared photonic lattices
James G. Fleming, Shawn-Yu Lin
Author Affiliations +
Abstract
3D photonic lattices are engineered 'materials' which are the photonic analogues of semiconductors. These structures were first proposed and demonstrated in the mid-to-late 1980's. However, due to fabrication difficulties, lattices active in the IR are only just emerging. A variety of structures and fabrication approaches have been investigated. The most promising approach for many potential applications is a diamond-like structure fabricated using silicon microprocessing techniques. This approach has enabled the fabrication of 3D silicon photonic lattices active in the IR. The structures display bandgaps centered from 12(mu) down to 1.55(mu) , depending on pitch.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James G. Fleming and Shawn-Yu Lin "3D silicon infrared photonic lattices", Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, (9 November 1999); https://doi.org/10.1117/12.369406
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Cited by 1 scholarly publication.
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KEYWORDS
Silicon

Infrared radiation

Silicon photonics

Photonic crystals

Chemical mechanical planarization

Transmittance

Fabrication

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