Laser-induced damage of overcoated materials at high humidity

Kunio Yoshida; Noriaki Tochio; M. Ohya; Toshimasa Matsuoka; K. Yagi; Kanyoshi Ochi; Schukichi Kaku; Tomosumi Kamimura; Nobu Kuzuu

doi:10.1117/12.379298

3 March 2000 Laser-induced damage of overcoated materials at high humidity

Kunio Yoshida, Noriaki Tochio, M. Ohya, Toshimasa Matsuoka, K. Yagi, Kanyoshi Ochi, Schukichi Kaku, Tomosumi Kamimura, Nobu Kuzuu

Author Affiliations +

Proceedings Volume 3902, Laser-Induced Damage in Optical Materials: 1999; (2000) https://doi.org/10.1117/12.379298
Event: Laser-Induced Damage in Optical Materials: 1999, 1999, Boulder, CO, United States

Abstract

Exfoliation of optical thin films at high humidity in the air is serious problem. Deterioration of three kind of optical thin films deposited on three types of substrate with different water-resistance at high humidity condition was studied. Thin films deposited on fused silica glass with highest water-resistance showed a best result for the exfoliation problem. Silica film seamed to be best for the surface observation at high humidity, but the laser -induced damage threshold was considerably lowered.

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Kunio Yoshida, Noriaki Tochio, M. Ohya, Toshimasa Matsuoka, K. Yagi, Kanyoshi Ochi, Schukichi Kaku, Tomosumi Kamimura, and Nobu Kuzuu "Laser-induced damage of overcoated materials at high humidity", Proc. SPIE 3902, Laser-Induced Damage in Optical Materials: 1999, (3 March 2000); https://doi.org/10.1117/12.379298

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